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Physical Vapor Deposition Technique for Growing Nanostructures |
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Sputter System • Our sputter system is a MagSput series product from Torr.International Inc. • It is a flexible planar magnetron sputtering system designed specifically for the R&D and prototype production. • The system can be used to deposit a wide variety of materials including aluminum, carbon, chromium, gold, Teflon, Silicon Dioxide, tantalum, tungsten, titanium and more. |
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Thermal • Thermal evaporation system is a homemade thermal evaporation system including 4 sources. • A 4 inch whole wafer can be put into the chamber for deposition. • Most metal materials can be deposited using this system. |